Nordson AP Batch Series Plasma System

Nordson MARCH‘s AP series of vacuum plasma treatment systems includes batch units with small, mid-size and large vacuum chamber options that deliver process correlation, controller continuity and reliable, reproducible vacuum gas plasma treatment to customers as they expand from an R&D environment to various levels of production

AP series plasma treatment machines are suitable for a wide variety of plasma cleaning, surface activation and adhesion improvement applications. These capabilities are used for semiconductor manufacturing, microelectronic packaging and assembly, and by manufacturers of medical and life science devices. The AP Series consists of four batch plasma treatment systems offering small, mid-size and large vacuum chamber options that deliver process correlation, controller continuity and reliable, reproducible vacuum gas plasma treatment to customers as they expand from an R&D environment to various levels of production.

Plasma Treatment Equipment Features and Benefits

• PLC controller with touch screen provides an intuitive graphical interface and real time process representation
• Flexible shelf architecture allows processing of a wide variety of part carriers in either direct or downstream plasma mode
• 13.56 MHz RF generator has automatic impedance matching for unparalleled process reproducibility
• Proprietary software control system generates process and production data for statistical process control
• Batch style, each unit is completely self-contained, requiring minimal floor space
• The pump, chamber, control electronics, and 13.56 MHz RF generator are housed in a single enclosure

Plasma Treatment Equipment Models and Configurations

AP-300 and AP-600